A New high energy-resolution soft-X-ray spectrometer for a transmission electron microscope

Terauchi, Masami*; Koike, Masato

Microscopy and Microanalysis, 9(S02), p.894 - 895, 2003/08

https://doi.org/10.1017/S1431927603444474

We have been developing a high energy-resolution soft-X-ray spectrometer for a transmission electron microscope to obtain the information of the density of states (DOS) of the valence band (occupied states) from identified small specimen areas. We have designed and produced a new grating. The new varied-line-spacing laminar-type holographic grating was designed to have a focal distance of about 50 cm. An energy resolution of about 0.7 eV is expected for X-ray energy of about 1000 eV.